Blar i SINTEF Open på forfatter "Wang, Dag Thorstein"

Viser treff 1-5 av 5

    • A miniaturized pressure sensor with inherent biofouling protection designed for in vivo applications 

      Clausen, Ingelin; Moe, Sigurd T.; Tvedt, Lars Geir Whist; Vogl, Andreas; Wang, Dag Thorstein (Journal article; Peer reviewed, 2011)
      The design, fabrication, and measurement results for a diaphragm-based single crystal silicon sensor element of size 820 µm × 820 µm × 500 µm are presented. The sensor element is designed for in vivo applications with ...

    • Biofouling on Protective Coatings for Implantable MEMS 

      Clausen, Ingelin; Seeberg, Trine Margrethe; Gheorghe, Codin; Wang, Dag Thorstein (Journal article; Peer reviewed, 2010)

    • Conductivity of high-temperature annealed silicon direct wafer bonds 

      Schjølberg-Henriksen, Kari; Tvedt, Lars Geir Whist; Gjelstad, Stein Are; Mørk, Christopher; Moe, Sigurd T.; Imenes, Kristin; Poppe, Erik; Wang, Dag Thorstein (Journal article; Peer reviewed, 2015)
      Silicon direct wafer bonding is a process with many application areas. Depending on the application, perfect insulation or negligible resistance is desired across the bonded interface. We have investigated the resistivity ...

    • Fabrication of an array of silicon microscales for the monitoring of chemical processes 

      Lacolle, Matthieu Jean P; Johansen, Ib-Rune; Wang, Dag Thorstein; Moe, Sigurd T.; Sagberg, Håkon; Clausen, Sigmund; Karlsson, Arne; Akporiaye, Duncan (Journal article; Peer reviewed, 2012)
      We present the fabrication and demonstration of a two-dimensional array of scales micromachined in silicon. Each scale consists of a platform suspended by a spring. The mass present on the platform of each scale is measured ...

    • Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding 

      Poppe, Erik Utne; Jensen, Geir Uri; Moe, Sigurd T.; Wang, Dag Thorstein (Journal article; Peer reviewed, 2016)
      The effect of bond anneal in Si-Si direct bonding of laminates With thin membranes suspending closed cavities is studied. For membranes of a certain size and thickness, it is found that the under-pressure in the cavity ...